Reduced-order Models for Microelectromechanical Systems

摘要

We propose robust one-degree-of-freedom models for extracting the pull-in voltage and pull-in deflection of clamped-clamped narrow microbeams and clamped rectangular, circular and elliptic membranes. In each case, the nonlinear scalar governing equation corresponds to the weak formulation of the problem with the basis function equaling either the deflection of the clamped structure under a uniformly distributed load or its first mode of vibration. The stretching of microbeam's midsurface is included in the analysis by considering the von Karman nonlinearity. The computed pull-in voltage and the pull-in deflection are found to agree well with those obtained by numerically solving governing equations for the continuous problems.