Influence of Ion Beam Assistance on Properties of Nitrogen-doped Titania Films Deposited by Cathodic Vacuum Arc

摘要

A nitrogen-doped titania film was prepared by cathodic vacuum arc method with ion-beam assistance in a mixed oxygenitrogen gas atmosphere. The effect of the ion beam current on the structural, optical properties and photocatalytic activity of nitrogen-doped titania film was studied. The as-deposited films were subjected to annealing with the atmospheric environment, and the change of film properties after annealing was investigated. The structures of all as-deposited films were amorphous. In the annealing process, the ion-beam-assisted nitrogen-doped titania films had a phase transition from amorphous to anatase polycrystalline with a strong TiO2 ana-tase (101) peak at a temperature of 500°C. When the ion-beam assistance was applied, the deposited nitrogen-doped titania films were found to the spectrum response of nitrogen-doped titania film deposited with ion beam assisted extended to the visible region, photocatalytic activity of nitrogen-doped titania film decreases with ion beam current increase from 80 to 160mA.