Application of tin-doped cadmium oxide films in CdTe/CdS solarcells

摘要

Transparent conducting tin-doped cadmium oxide films (CdO:Sn) havebeen deposited by metalorganic chemical vapor deposition (MOCVD) atatmospheric pressure. The effects of various deposition parameters, suchas the partial pressures of DMCd and TMT, and substrate temperature, onthe electrical and optical properties of as-deposited films werestudied. A sheet resistance of 14~17 Ω/sq was obtained for a filmthickness of 125 nm. The high conductivity of the as-deposited films wasdue to their high carrier concentrations. The transmission of the filmsin the visible range (500-850 nm) was found to be high (80~95%). Bothelectrical and optical properties of the as-deposited films improvedafter annealing in H₂ or He ambient. CdTe/CdS solar cellshave been fabricated using CdO:Sn as the front contact and a conversionefficiency of 14.3% has been obtained