Challenges and opportunities for MEMS foundries: Staying alive in a highly diversified market

摘要

Since its foundation in 1999, microFAB Bremen has provided silicon wafer processing services to MEMS companies worldwide. As one of just a few non-captive, pure-play foundries in this market segment, microFAB offers fabrication of customised micro machined products, ranging from prototype to high-volume serial production. In my paper, I will highlight some of microFAB's experiences made and decisions taken to meet the challenges and opportunities of the foundry business and how it compares to the classical IC foundry concepts.