W-band MEMS TWT- array

摘要

A novel traveling wave tube (TWT) array based on micro electromechanical systems (MEMS) fabrication is proposed. It consists of TWT elements coupled together under a common magnetic field. The TWT-array has the capability to generate high-power microwaves with relatively low-voltage electron beams. The low-voltage operation reduces the system overhead and leads to a miniaturized millimeter wave generator. The fabrication adopts well developed IC and MEMS processing technology, and be incorporated in a MEMS post package stage as a part of the process. The proposed structure leads to a new class of compact, high efficiency, and reliable W-band frequency sources.