首页> 外文会议>SEMICON China technical symposium >^4fWater Conservation and Waste Streams Management in TFT-LCD Flat Panel Fabs
【24h】

^4fWater Conservation and Waste Streams Management in TFT-LCD Flat Panel Fabs

机译:^ 4FT-LCD平板电厂的保护和废物流管理

获取原文

摘要

^7fTFT-LCD flat panel manufacturing has been affected by rapid changes in the fabrication process as technology has advanced from one generation to the next. The advancements have resulted in continuous changes to the site water balance and waste stream chemical constituents and contributed to facility design challenges. Facility capital and operating costs associated with handling waste streams can be reduced through selective segregation, reclaim and treatment. Waste stream management flexibility will be dependent on local standards for reclaim requirements and discharge limitations. This paper addresses major flat panel water users and opportunities for waste stream segregation and reuse. Fabrication process areas discussed will include TFT array, Color Filter, and LCD as major topics. Emphasis on design planning will be presented to help minimize facility waste streams that must be collected, treated and discharged from the site as effluent wastewater. Waste streams suitable for recovery will be categorized by similar production process. Further details will be provided to manage waste streams based on their qualities at various process tools and operations. The paper's goal is to outline a plan that will help minimize the number of waste streams directed to off site discharge and the most expensive treatment facility while maximizing the number of waste streams directed to the least expensive treatment systems.
机译:^ 7FTFT-LCD平板制造受到制造过程的快速变化的影响,因为技术从一代到下一个技术进步。进步导致现场水平衡和废物流化学成分的持续变化,并为设施设计挑战做出了贡献。通过选择性隔离,回收和治疗可以减少与处理废物流相关的设施资本和运营成本。废物流管理灵活性将取决于局部回收需求和放电限制的当地标准。本文涉及主要的平板水用户和废物流隔离和重用的机会。讨论的制造过程区域将包括TFT阵列,滤色器和LCD作为主要主题。将提出强调设计规划,以帮助最大限度地减少必须从现场收集,处理和排放的设施废物流作为流出废水。适用于恢复的废物流将通过类似的生产过程进行分类。将提供进一步的详细信息,以基于各种过程工具和操作的素质来管理废物流。本文的目标是概述一个计划,这将有助于最大限度地减少针对场地排放和最昂贵的处理设施的废物流的数量,同时最大化针对最便宜的处理系统的废物流数。

著录项

相似文献

  • 外文文献
  • 中文文献
  • 专利
获取原文

客服邮箱:kefu@zhangqiaokeyan.com

京公网安备:11010802029741号 ICP备案号:京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有
  • 客服微信

  • 服务号