Micro-Machined Water Vapor Sensors: A Review of Sensing Technologies

摘要

1. Water is the most pervasive chemical on Earth, Fundamental to all life processes. 2. Solid (1) Frost and permafrost; (2) Snow, ice and glaciers; (3) Polar ice caps. 3. Liquid (1) Dew, condensate and rain; (2) Ponds, rivers, lakes and oceans. 4. Vapor (1) Molecular films, aerosols, fog and clouds; (2) Saturated and superheated steam.