Polymeric optical waveguides fabrication by direct write electron beam lithography

摘要

Rib-type single-mode channel waveguides using the polymer SU8C were fabricated by direct write electron beam lithography. The propagation loss of the channel waveguides was measured and found to be 0.22dB/cm and 0.48dB/cm at 1.31 um and 1.55 um, respectively.