Design and fabrication of a polymer micro ring resonator with laser beam direct write lithography technique

摘要

In this article, we describe our work on design and fabrication of a polymer Micro Ring Resonator. This device has been constructed by laser beam direct write lithography technique (LBL).We used ORMOCORE photoresist for fabricating a micro ring resonator due to its very low losses at wavelengths 1550 nm and 1300 nm and also used a tapered fiber to couple light into the bus waveguide and received the signal from the output port of the waveguide by using another tapered fiber which the gap between bus waveguide and ring waveguide is then filled with nitrobenzene liquid by micropipette (which has large dependence of the refractive index on temperature) for increasing efficiently coupling to ring waveguide. The signal has been monitored by using an optical spectrum analyze .This micro ring resonator in the laterally coupled geometry for wavelength 1550 (nm) have band width (Δλ) 0.3 (nm), free spectral range of 0.8 (nm) and finesse of 2.6.