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Cost/Resource Saving Process for Scalable Film Optical Link Multi-chip-module (S-FOLM)

机译:可伸缩胶片光链路多芯片模块(S-FOLM)的成本/资源节省过程<具有选择性占领重复转移(SORT)的光刻包装(PL-Pack)>

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"Photolithographic Packaging (PL-Pack) with Selectively Occupied Repeated Transfer (SORT)" is proposed for optoelectronic system integration. PL-Pack with SORT integrates different types of thin-film device pieces into one substrate with desired configurations using all-photolithographic process. A process design example is presented for Scalable Film Optical Link Multi-chip-module (S-FOLM). A preliminary estimation reveals that PL-Pack with SORT will achieve Ⅲ-Ⅴ epitaxial material saving of <1/100 and module cost reduction of <1/10, comparing with flip-chip-bonding-based packaging. The result indicates that the process will save cost and resource simultaneously. Critical issue is how to simplify the procedure for distributing thin-film device pieces onto a substrate. SORT is found to reduce the distribution step count typically by factor of <1/10-1/10000 comparing with conventional One-by-One method.
机译:“具有选择性地占用重复转移(SORT)”的光刻包装(PL-PACK),用于光电系统集成。 PL-PACK配合使​​用全光刻工艺将不同类型的薄膜装置片与一个具有所需配置的基板集成在一起。提出了一个过程设计示例,适用于可伸缩薄膜光学链路多芯片模块(S-FOLM)。初步估计表明,与倒装芯片键合的包装相比,PL-PACK的PL-PACK将达到Ⅲ-Ⅳ外延材料节省<1/100和模块成本降低,比较倒装芯片粘接的包装。结果表明该过程将同时节省成本和资源。关键问题是如何简化将薄膜设备件分配到基板上的过程。发现排序可以减少分布步数,通常按与传统逐一方法相比的<1/10-1 / 10000的因子。

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