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The Proximity of Microvias to Plated-Through Holes and Their Impact on the Reliability of These Microvias

机译:微型通孔到镀通孔的邻近度及其对这些微型通孔可靠性的影响

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High Density Interconnect (HDI) technology is fast becoming the enabling technology for the next generation of small portable electronic communication devices. These methods employ many different dielectrics and via fabrication technologies. In this research, the effect of the proximity of microvias to plated-through holes (PTHs) and their effect on the reliability of the microvias was extensively evaluated. The reliability of microvia interconnect structures was evaluated using Liquid-To-Liquid Thermal Shock (LLTS) testing (-55°C to 125°C) and comprehensive failure analysis. Test vehicles that were manufactured by multiple vendors were used in this study. The test vehicles incorporated microvias that were fabricated using different laser ablation and photoimaging technologies. Laser technologies, such as YAG laser drilling and YAG-CO_2 laser drilling, in non-glass reinforced and glass reinforced dielectric materials were evaluated. The resistance of the via chain was measured at various stages of LLTS testing. Samples that failed were subjected to non-destructive and destructive analysis in order to fully understand the failure mechanism. The effect of the plating thickness, via fabrication technology, dielectric material and the effect of the proximity of microvias to the PTHs on the fatigue life were studied. It was found that the location of microvias vis-a-vis PTHs did have an effect on the reliability of microvias.
机译:高密度互连(HDI)技术正迅速成为下一代小型便携式电子通信设备的使能技术。这些方法采用许多不同的电介质和通孔制造技术。在这项研究中,广泛评估了微通孔到镀通孔(PTH)的影响及其对微通孔可靠性的影响。使用液-液热冲击(LLTS)测试(-55°C至125°C)和全面的故障分析来评估微孔互连结构的可靠性。在这项研究中使用了由多个供应商制造的测试车辆。测试车辆包含使用不同的激光烧蚀和光成像技术制造的微孔。对非玻璃纤维增​​强和玻璃纤维增​​强介电材料中的激光技术(例如YAG激光钻孔和YAG-CO_2激光钻孔)进行了评估。在LLTS测试的各个阶段都测量了通孔链的电阻。对失败的样本进行了非破坏性和破坏性分析,以全面了解破坏机理。研究了镀层厚度,通孔制造技术,介电材料以及微孔与PTH的接近度对疲劳寿命的影响。发现微孔相对于PTH的位置确实对微孔的可靠性有影响。

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