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SbFSub 3/ as vaporizer feed material for the bernas dual vaporizer in the VSEA E220/500 implanters

机译：SbFSub 3 /作为VSEA E220 / 500植入机中的Bernas双蒸发器的蒸发器进料

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《Ion Implantation Technology, 2000. Conference on》|2000年|P.542-545|共4页
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Reyes; J.M.;
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中图分类无线电电子学、电信技术;
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