Adhesion's macroscopic exhibition of CVD diamond films on Si substrate and its relationship with film's microstructure

摘要

The adhesion force of a CVD diamond film on a Si substrate was detected by direct tensile tests. The test was performed on a tensile testing rig equipped with a S570 scanning electronic microscope, and the whole testing process (load-strain curve) was recorded. By means of Raman spectrum analysis and SEM photography, the relationship between the microstructure of the diamond film and the macro-exhibition of the adhesion force is found and a reasonable explanation of this phenomenon is given.