Micro-electromechanical systems spatial light modulator development

摘要

The NSF Center for Adaptive Optics (CfAO) is coordinatiing a five to ten year program for the development of MEMS-based spatial hight modulators suitable for adaptive optics applications. Participants in this multi-disciplinary program include several partne4r instituions and research collaboratiors. The goal of this program is to produce MEMS spatial light modulators with several thousand actuators that can be used for high-resolution wavefront control applocations and would benefit from low device cost, small system size, and low power requireements. We present an overview of the CfAO MEMS development plan along with details of the current program status. Piston mirror array devices that satisfy minimum application requirements have been developed, and work is continuing to enhance the piston devices, add tip-tilt functionality, extend actuator stroke, create a large array addressing platform, and develop new coating processes.