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Fabrication and characterization of high-speed integrated electro-optic lens and scanner devices

机译:高速集成电光透镜和扫描仪设备的制造和表征

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Abstract: We demonstrate two high-speed electro-optic devices: an integrated lens/scanner and a variable radius collimating lens stack fabricated on a single crystal of Z-cut LiTaO$-3$/. The lens and scanner components consist of lithographically defined domain-inverted regions extending through the thickness of the crystal. A lens power of 0.233 cm$+$MIN@1$/kV$+$MIN@1$/, a deflection angle of 12.68 mrad kV$+$MIN@1$/, and a scan rate of 225 kHz at 375 V were observed. The collimating lens stack is theoretically capable of collimating the output from 2 - 10 micron diameter channel waveguides. !15
机译:摘要:我们演示了两种高速电光设备:集成的透镜/扫描器和在Z形切割LiTaO $ -3 $ /单晶上制造的变径准直透镜叠层。透镜和扫描仪组件由延伸穿过晶体厚度的光刻定义的畴反转区域组成。镜头光焦度为0.233 cm $ + $ MIN @ 1 $ / kV $ + $ MIN @ 1 $ /,偏转角为12.68 mrad kV $ + $ MIN @ 1 $ /,375 V的扫描速率为225 kHz被观察。理论上,准直透镜叠层能够准直直径为2到10微米的通道波导的输出。 !15

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