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Fabrication and characterization of high-speed integrated electro-optic lens and scanner devices

机译:高速集成电光镜头和扫描仪器件的制造与表征

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We demonstrate two high-speed electro-optic devices: an integrated lens/scanner and a variable radius collimating lens stack fabricated on a single crystal of Z-cut LiTaO$-3$/. The lens and scanner components consist of lithographically defined domain-inverted regions extending through the thickness of the crystal. A lens power of 0.233 cm$+$MIN@1$/kV$+$MIN@1$/, a deflection angle of 12.68 mrad kV$+$MIN@1$/, and a scan rate of 225 kHz at 375 V were observed. The collimating lens stack is theoretically capable of collimating the output from 2 - 10 micron diameter channel waveguides.
机译:我们展示了两个高速电光器件:集成镜头/扫描仪和在单个Z-Cut Liao $ -3 $ /中制造的可变半径准直镜头堆栈。镜头和扫描仪部件包括通过晶体厚度延伸的光刻限定的畴 - 倒置区域。镜头电源为0.233厘米$ + $ min @ 1 $ / kV $ + $ min @ 1 $ /,偏转角为12.68mrad kv $ + $ min @ 1 $ /,325 kHz扫描速度为375 v被观察到。准直透镜叠层理论上是能够准直的输出从2-10微米直径通道波导。

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