Pick and place operation of a micro-object with high reliability and precision based on micro-physics under SEM

摘要

The basic strategy for reliable and precise pick-and-place operation is shown based on the actual measurement of adhesion under SEM. Dynamics for pick-and-place operation of a microsphere by a needle-shaped tool is analyzed. A new method of reliable pick and precise place is proposed on the basis of the basic strategy and the dynamics. An experimental system for executing the proposal operation is constructed based on the numerical-control of the position measurement of the target object. In this system, many numerically-controlled experiments with 2 /spl mu/m polystyrene spheres reveal that under the optimal conditions, the pick operation has never failed once out of over 20 trials and the place operation has 140 nm precision in position. Consequently, we conclude that the proposed method can realize pick operation with high reliability and place operation with high precision under SEM based on micro-physics.