A hard X-ray microbeam with submicrometer spot size from synchrotron radiation (SR) sources is expected to add a new dmension to various X-ray analysis methods. A Fresnel zone plate (FZP) is one of the promising focusing elements for X-rays. In order to develop high performance multilayer FZP for use in the hard X-ray region, Cu/Al concentric multilayers were fabricated by use of a DC sputtering deposition process. Lower Ar gas pressure or higher rotating speed of a wire substrate has been effective in forming smoother multilayer interfaces. From a focusing test of the cu/Al FZP (100-zones) by the SR (#lambda#-0.154nm), microbeams of 1.5 #mu#m #PHI# and 0.8 #mu#m #PHI# have been achieved for the first- and third-order focal beams, respectively.
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机译：来自同步加速器辐射（SR）的亚微米光斑尺寸的硬X射线微束有望为各种X射线分析方法增加新的维度。菲涅耳波带片（FZP）是X射线有希望的聚焦元件之一。为了开发用于硬X射线区域的高性能多层FZP，通过使用DC溅射沉积工艺来制造Cu / Al同心多层。较低的氩气压力或较高的线基板转速可有效地形成更光滑的多层界面。通过SR（＃lambda＃-0.154nm）对cu / Al FZP（100个区域）的聚焦测试，已实现1.5＃mu＃m＃PHI＃和0.8＃mu＃m＃PHI＃的微束一阶和三阶聚焦光束。
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