Focusing efficiency of a multilayer Fresnel zone plate for hard X-ray fabricated by DC sputtering deposition

摘要

A hard X-ray microbeam with submicrometer spot size from third-generation high brilliance synchrotron radiation (SR) sources is expected to be a powerful tool for various fields of research. A Fresnel zone plate (FZP) is one of the promising, focusing elements for X-rays. Focusing efficiency is one of the important features of the FZP. In order to fabricate an FZP with a high focusing efficiency, it is necessary to investigate the relation between the experimental values of the focusing efficiency and the theoretical ones. We have fabricated Ag/C and Cu/Al multilayer (sputtered-sliced) FZPs for use in hard X-ray region, and have compared the measured focusing efficiency data with the calculated ones. The experimental data have been in good agreement with the theoretical values.