Stress-corrosion cracking of spin-on glass thin films

摘要

The crack-velocity behavior of silsesqioxane spin-on glass thin films exposed to moist environments is examined. An absolute reaction-rate model is used to predict crack velocity using a deleted-bound model and fused silica as a basis, and compared with observed steady-state crack velocities as a function of film thickness and variations in the curing process. An implication is that, on curing, the driving force for film fracture, determined by thermal expansionmismatch, increases less rapidly than the fracture resistance, determined by polymerization.