Microsystems for Diverse Applications using Recently Developed Microfabrication Techniques

摘要

The continuous progress in micro and nano-system technologies has allowed the successful development of many innovativje products in process control, environmental monitoring, healthcare, automotive and aerospace as well as information processing systems. In this paper on overview will be given of current progress in micro-and nanofabrication process technolgoies, such as deep reactive ion etching, micro-electro discharge machining, thick photoresist processing and plating. The availability of these icro-and nanofabrication processes will be illustrated with examples of new generations of silicon-based sensors, actuators and Micryosystems with a particalar emphasis on real applications of these components and systems.