Low-power micromachined structures for gas sensors with improved robustness

摘要

Current research on microstructures for semiconductor gas sensors is on the development of low power and robust substrates. In this paper a microstructure based on the combination of micromachiend silicon substrates and glass wafers is presented. This device shows high robustness and can reach high temperatures up to 700degC with good power consumption. The optimisation of the design and the process fabrication is described.