Air Jet paper mover: An example of meso-scale MEMS

摘要

The motion of human scale objects requires MEMS-like device arrays capable of providing reasonable forces (> mN) over human scale distances (10-100 cm). In principle batch fabricated valves controlling air jets can satisfy these actuation requirements. By extending printed circuit board technology to include electromechanical actuation, analogous to the extension of VLSI to MEMS, the requirement of low system cost can be achieved through batch fabrication and integration of the transduction elements with computational and communication elements. In this paper we show that modulated air jets arrayed with position sensors can support and accelerate flexible media without physical contact. Precise motion control with three degrees of freedom parallel to the array, using high flow, low pressure air jet arrays is enabled using electrostatic valves having opening and closing times of ～l ms. We present results of an exemplary platform based on printed circuit board technologies, having an array of 576 electrostatic flap valves (1152 for double-sided actuation) and associated oriented jets, and an integrated array of 32,000 optical sensors for high resolution detection of paper edge positions. Under closed loop control edge positioning has a standard deviation of ～25 microns. Fabrication and control of the system is described.