Micro-resonator modified as magnetic sensor

摘要

Balanced doubly suspended structure has been used earlier for very precise high Q resonators. But here we have used the unbalanced half section which is sputter deposited with a magnetic film. The central axis acts like a torsion wire of about a micron width and thcikeness. The outer arm deflects downwards about the torsion axis when subjected to a magnetic file dfrom beneath the sample. The deflection is measured by the reflected light presently under an optical microcope but can also be done by reflecting a laser beam as done in AFMs. The beneding angle-versus-magnetic field is quite linear.