首页> 外文会议>International optical design conference >Optical Design and Implementation of a Multi-Functional Miniature Interferometer
【24h】

Optical Design and Implementation of a Multi-Functional Miniature Interferometer

机译:多功能微型干涉仪的光学设计与实现

获取原文

摘要

The design of a newly developed interferometer is described. This interferometer possesses built-in measuring modes such as: (1) absolute vibration, (2) differential vibration, and (3) distance measuring. The circular polarization interferometer configuration, which gives it its compact size and which has a built-in microscopic imaging system, is detailed. In addition, the mechanical layout of the system which guarantees that all alignment functions are orthogonal to each other is also discussed. Various experimental tests were performed to demonstrate the nanometer resolution and megahertz bandwidth capabilities of this new developed interferometer.
机译:描述了新开发的干涉仪的设计。这种干涉仪具有内置测量模式,如:(1)绝对振动,(2)差振动,(3)距离测量。详细介绍了一种圆极化干涉仪配置,其使其具有紧凑且具有内置的微观成像系统。另外,还讨论了系统的机械布局,其保证所有对准功能彼此正交。进行各种实验测试以展示该新型发发干涉仪的纳米分辨率和Megahertz带宽能力。

著录项

相似文献

  • 外文文献
  • 中文文献
  • 专利
获取原文

客服邮箱:kefu@zhangqiaokeyan.com

京公网安备:11010802029741号 ICP备案号:京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有
  • 客服微信

  • 服务号