首页> 外国专利> OPTICAL DELAY LINE, LOW-COHERENCE INTERFEROMETER IMPLEMENTING THIS LINE, MEASURING METHOD AND DEVICE IMPLEMENTING THIS INTERFEROMETER

OPTICAL DELAY LINE, LOW-COHERENCE INTERFEROMETER IMPLEMENTING THIS LINE, MEASURING METHOD AND DEVICE IMPLEMENTING THIS INTERFEROMETER

机译:光学延迟线,实现该线的低相干干涉仪,实现该干涉仪的测量方法和设备

摘要

An optical delay line (LR) intended to be implemented in an interferometer, comprising a rotating polygon (29). This polygon (29) is arranged to modulate the respective optical paths of first and second light beams (Li1, Li2), which are issued from the same what is called measurement beam, and which are directed through the polygon (29) toward a first and a second reflector (21, 22), respectively, so as to generate an optical delay by way of the difference between the optical paths of these first and second beams (Li1, Li2). Implementation in an optical measuring device integrating a low-coherence interferometer.
机译:打算在干涉仪中实现的光延迟线(LR),包括旋转多边形(29)。该多边形(29)被布置成调制第一光束和第二光束(Li1,Li2)的各自的光路,第一光束和第二光束(Li1,Li2)从被称为测量光束的光束发出,并且被引导通过多边形(29)而朝向第一光束。第一和第二反射器(21、22)分别通过这些第一和第二光束(Li1,Li2)的光路之间的差产生光延迟。在集成了低相干干涉仪的光学测量设备中实现。

著录项

  • 公开/公告号EP3580521A1

    专利类型

  • 公开/公告日2019-12-18

    原文格式PDF

  • 申请/专利权人 FOGALE NANOTECH;

    申请/专利号EP20180706418

  • 发明设计人 COURTEVILLE ALAIN;

    申请日2018-02-02

  • 分类号G01B9/02;G01B11/06;

  • 国家 EP

  • 入库时间 2022-08-21 11:39:23

相似文献

  • 专利
  • 外文文献
  • 中文文献
获取专利

客服邮箱:kefu@zhangqiaokeyan.com

京公网安备:11010802029741号 ICP备案号:京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有
  • 客服微信

  • 服务号