An overview of the excimer laser market shows the trend towards shorter operating wavelengths. The optical properties of vacuum ultraviolet materials are described and the design of a reflective fluoride multilayer coating for 157 nm is given. Practical considerations and techniques used for the coating manufacture are discussed. Results on coating performance and film properties are presented. Finally, a summary reviews the relevant aspects and salient points encountered during the project with an indication of the direction of any subsequent follow-up work.
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