Abstract: Laser induced damage in optical coatings is a complicated problem, which is attributed to a lot of factors, including environment parameters, laser parameters and thin film production parameters. Among the three factors, production parameters interest us most. We produce a series of samples with different roughness levels of the substrates, thin film material and vacuum environment within the chamber, etc. Using 1.06 $mu@m Nd:YAG laser as our test laser, we make 1- on-1 laser damage test to these samples. Some interesting phenomena are found. We calculate the laser induced local heating within the thin film multilayers, and make analysis to the experimental phenomena. Conclusions are given. !11
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机译：摘要：激光对光学镀膜的损伤是一个复杂的问题，其归因于许多因素，包括环境参数，激光参数和薄膜生产参数。在这三个因素中，生产参数是我们最感兴趣的。我们生产了一系列样品，这些样品具有不同的基材粗糙度水平，薄膜材料和腔室内的真空环境等。使用1.06 $ mu @ m Nd：YAG激光作为我们的测试激光，我们会产生1-on-1激光损伤测试这些样品。发现了一些有趣的现象。我们计算了薄膜多层内激光诱导的局部加热，并对实验现象进行了分析。得出结论。 ！11
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