Structural properties of a-Ge_1-xC_x:H alloys prepared by the rf sputtering technique

摘要

Structural and mechanical propoerties of hydrogenated amorphous germanium carbon (a-Ge_1-xC_x:H) alloys are presented.The films were prepared by the rf-co-sputtering technique using a graphite/germanium composed target.The carbon and germanium relative concentrations were determined by RBS. and the total hydrogen concentration by ERDA measurements. An increase in the optical gap was measured for low carbon content (0