In this paper, a global clock network that incorporates standing waves and coupled oscillators to distribute a high-frequency clock signal with low skew and low jitter is described. The key design issues involved in generating standing waves on a chip are discussed, including minimizing wire loss within an available technology. A standing-wave oscillator, a distributed oscillator that sustains ideal standing waves on lossy wires, is introduced. A clock grid architecture comprised of coupled, standing-wave oscillators and differential, low-swing clock buffers is presented. The measured results for a prototyped standing-wave clock grid operating at 10GHz and fabricated in a 0.18μm 6M CMOS logic process are presented. A technique is proposed for on-chip skew measurements with subpicosecond precision.
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