Abstract: Bulk silicon micromachined IR bolometer detectorsoperating at room temperature are presented. Thesedevices are based on VO$-2$/ films typically exhibitinga thermal coefficient of resistance of the order of$MIN@3%/$DGR@C. Detector sizes are 50 $mu@m $MUL 50$mu@m and 100 $mu@m $MUL 100 $mu@m, and they arearranged in 1 $MUL 64, 1 $MUL 128 and 1 $MUL 256 pixellinear arrays. A test bench for detector performanceevaluation is described. The fabricated detectorsexhibit responsivities of up to approximately 20,000V/W, normalized detectivities typically exceeding10$+8$/ cmHz$+$HLF$/ W$+$MIN@1$/, and response timestypically below 20 ms, At 300 K and a frequency of 30Hz, the noise equivalent temperature difference forthese detectors is of the order of 3 $MUL10$+$MIN@2$/$DGR@C. A bolometer simulation tool is alsobriefly described.!8
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机译：摘要：提出了在室温下工作的体硅微机械红外辐射热探测器。这些器件基于VO $ -2 $ /膜，通常表现出大约MIN @ 3％/ $ DGR @ C的热阻系数。检测器的大小为50 $ mu @ m $ MUL 50 $ mu @ m和100 $ mu @ m $ MUL 100 $ mu @ m，它们以1 $ MUL 64、1 $ MUL 128和1 $ MUL 256像素线性阵列排列。描述了用于检测器性能评估的测试台。装配好的探测器的响应率最高约为20,000V / W，归一化的检测率通常超过10 $ + 8 $ / cmHz $ + $ HLF $ / W $ + $ MIN @ 1 $ /，响应时间通常低于20 ms，在300 K和当频率为30Hz时，噪声等效温差检测器约为3 $ MUL10 $ + $ MIN @ 2 $ / $ DGR @ C。还简要介绍了辐射热计仿真工具。！8
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