Humidity effects on surface discharges induced in nonthermal plasma processing for volatile organic compounds (VOCs) decomposition was studied extensively, because reactive OH radicals generated in the plasma are assumed to decompose dilute VOCs contaminated in air. The humidity of sample air contaminated with 1000 ppm CFC-113 was controlled with water bubbling where the water temperatures were 7/spl deg/C, 17/spl deg/C, 45/spl deg/C and 70/spl deg/C. The decomposition efficiency of CFC-113 was a little better in the dry air case. The decomposition efficiency of trichloroethylene was not affected by humidity.
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