Manufacturing performance of the ALTA 3000 mask laser writer

摘要

Abstract: This paper describes the manufacturing performance of the ALTA 3000 laser writer at the IBM mask fabrication facility in Essex Junction, Vermont. Current mask parametric performance for feature size control (x-bar and 3-sigma), registration and defect density of 4x and 5x reticles is presented. In addition, reliability data and write-time data for typical 64 Mb and 256 Mb reticles are provided. !5