Ultraprecision grinding of optical materials and components applying ELID (electrolytic in-process dressing)

摘要

Abstract: A grinding method which uses specific metallic bondfine grit wheels and electrolytic in- process dressing(ELID) is proposed for the effectual mirror surfacegrinding of brittle materials. Significant results suchas high ground surface quality and ultraprecisiongrinding have been achieved through the use of this newgrinding technique: `ELID-Grinding'. The ELID techniquerealizes efficient grinding by eliminating severalgrinding steps and interprocess dressings, in thegeneral grinding operation. Applications to opticalcomponents have also started.!8