Ultraprecision grinding of optical materials and components applying ELID(electrolytic in-process dressing),

摘要

Abstract: A grinding method which uses specific metallic bond fine grit wheels and electrolytic in- process dressing (ELID) is proposed for the effectual mirror surface grinding of brittle materials. Significant results such as high ground surface quality and ultraprecision grinding have been achieved through the use of this new grinding technique: `ELID-Grinding'. The ELID technique realizes efficient grinding by eliminating several grinding steps and interprocess dressings, in the general grinding operation. Applications to optical components have also started.!8