首页> 外文会议>Advances in Resist Technology and Processing XII >Spectroscopic characterization of molecular interactions between DNQ-PACs and phenolic resins using selectively nitrogen-15 labeled DNQs
【24h】

Spectroscopic characterization of molecular interactions between DNQ-PACs and phenolic resins using selectively nitrogen-15 labeled DNQs

机译:使用选择性氮15标记的DNQ光谱表征DNQ-PAC与酚醛树脂之间的分子相互作用

获取原文

摘要

Abstract: Interactions between diazonaphthoquinone (DNQ)-photoactive compounds (PACs) and phenolic resins with different degrees of ortho, ortho-bonding have been investigated using solid state nitrogen-15 nuclear magnetic resonance (NMR) and vibrational (infrared and Raman) spectroscopic techniques. A specifically nitrogen-15 labeled PAC was synthesized to facilitate solid state nitrogen-15 NMR experimentation, and to resolve ambiguities in vibrational spectra. Comparison of vibrational spectra of the $+15$/N-labeled PAC and its natural abundance $+14$/N analog showed conclusively that Fermi resonance as well as hydrogen-boding resin-PAC interactions influence changes in the out-of-phase diazo stretching region near 2100 cm$+$MIN@1$/. Solid state nitrogen-15 NMR of the $+15$/N-labeled PAC in poly(p-hydroxystyrene), in a m-cresol 3,5-xylenol novolak, and in a mainly m,p- cresol novolak showed the binding situation in the resins to be diffuse, but quite similar. Although the three resins examined are lithographically very different, the observed nitrogen- 15 shifts were small compared to the broadening of the resonances, and did not show major differences due to ortho, ortho-bonding effects. !10
机译:摘要:使用固态氮15核磁共振(NMR)和振动(红外和拉曼)光谱技术研究了重氮萘醌(DNQ)-光敏化合物(PACs)与不同邻位,邻键度的酚醛树脂之间的相互作用。合成了一个特殊的氮15标记的PAC,以促进固态氮15 NMR实验,并解决振动光谱中的歧义。比较$ + 15 $ / N标记的PAC及其天然丰度$ + 14 $ / N的振动光谱,可以得出结论,费米共振以及与氢键结合的树脂-PAC相互作用会影响异相变化。重氮拉伸区域在2100 cm $ + $ MIN @ 1 $ /附近。聚(对羟基苯乙烯),间甲酚3,5-二甲苯酚线型酚醛清漆和主要为间位对甲酚线型酚醛清漆中$ + 15 $ / N标记的PAC的固态氮15 NMR树脂中的情况有待扩散,但颇为相似。尽管所检查的三种树脂在光刻技术上有很大的不同,但是与共振的扩宽相比,观察到的氮15位移很小,并且由于邻位,邻键作用而没有显示出主要差异。 !10

相似文献

  • 外文文献
  • 中文文献
  • 专利
获取原文

客服邮箱:kefu@zhangqiaokeyan.com

京公网安备:11010802029741号 ICP备案号:京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有
  • 客服微信

  • 服务号