For pt. II see Proc. IECON '93, p.1573-6, 1993. The multi-layer piezo-ceramic actuator has been watched with interest for its fast response and high torque. So far we have carried out the equivalent circuit analysis on this actuator and demonstrated that it has a capacitive property. Then, we proposed the high-speed charge-and-discharge circuit to drive the actuator at a high speed. In this paper, we discuss the actuator for which we obtained a response speed by executing step response and pulse response with the laser displacement meter at the time of no load. In addition, we also described the actuator for which we measured the response speed with the load sensor at the time of high load.
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