A new single mode optical waveguide has been developed to obtain optoelectronic multichip modules. It is fabricated using siloxane polymer and thin film process technology onto a copper polyimide ceramic substrate. The siloxane polymer refractive index is 1.451, very similar to that of SiO/sub 2/. It is revealed that titanium doped siloxane polymer has refractive index of 1.4537 to 1.5949 (at 632.8 nm wavelength) which can be controlled by the TiO/sub 2/ content. The siloxane polymer which contains 2.0 wt% of TiO/sub 2/ has refractive index of 1.4437 at 1550 nm wavelength. Therefore, the siloxane polymer and the TiO/sub 2/ doped siloxane polymer can be used for cladding and core layers respectively, enabling a single mode waveguide. The core size is designed to be 4-8 /spl mu/m wide by 7.0 /spl mu/m thick to obtain a single mode optical waveguide at /spl Delta=0.0022.
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机译:已经开发出一种新的单模光波导来获得光电多芯片模块。它是使用硅氧烷聚合物和薄膜工艺技术在聚酰亚胺铜陶瓷基板上制成的。硅氧烷聚合物的折射率为1.451,非常类似于SiO / sub 2 /的折射率。揭示了钛掺杂的硅氧烷聚合物具有1.4537至1.5949的折射率(在632.8nm波长处),其可以由TiO / sub 2 /含量控制。包含2.0重量%的TiO / sub 2 /的硅氧烷聚合物在1550nm的波长下的折射率为1.4437。因此,硅氧烷聚合物和TiO / sub 2 /掺杂的硅氧烷聚合物可以分别用于包层和芯层,从而实现单模波导。纤芯尺寸设计为4-8 / spl mu / m宽乘以7.0 / spl mu / m厚,以获得/ spl Delta / n = 0.0022的单模光波导。
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