THE STUDY OF LIGHT DOPED CHROMIUM SI-GaAs SINGLE CRYSTAL IN THE LEC TECHNOLOGY

摘要

In this paper, a special technique through the light doped or super-light doped (LDC or SLDC) chromium was reported by LEC system. It was able to obtain repeatedly SI-GaAs crystal of the high resistivity and the mobility. To make inhomogeneities of the resistivity decreases to 10% and to explore for the machine-made of the compensation of the LDC or SLDC.