Block Copolymer line roughness measurement via PSD: application to fingerprint samples

摘要

This paper introduces line roughness characterization non-straight patterns made of block copolymers (fingerprint patterns). Line Width Roughness have been determined using Power Spectral Density based on a special edge detection developed at CEA-LETI to extract edges contours. We investigated several process parameters impact on LWR such as the degree of polymerization of different BCPs and the impact of UV irradiation on the roughness of the PS block.