A new type of highly sensitive ozone (O{sub}3) metal oxide gas sensor has been developed. Various mixtures of In{sub}2O{sub}3, ZnO and SnO{sub}2 were deposited on alumina substrates containing indigitated electrodes by means of Vacuum Thermal Evaporation (VTE). Deposition rate of the sensing layer was varied from 0.3nm/s-1.4nm/s. The highest sensitivity of the sensors was found at a deposition rate of 1.2nm/s-1.4nm/s. In addition the O{sub}3 sensors were found to perform best with a 40nm thick sensing layer. With such sensors, environmentally relevant ozone concentrations can be measured (0-500ppb (parts per billion)). Different combinations of this material were investigated and compared focusing on the sensitivity and performance when exposed to ozone. Most of the current metal oxide ozone sensors on the market have the disadvantage of requiring operation at elevated temperatures (200°C-600°C) [1]. Room temperature operation has some major advantages over elevated temperature operation such as, reduced fabrication costs, reduced operating costs, as well as ease of implementation into portable/handheld devices.
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