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Deposition Technologies for Electronic Systems Based on Ultra-Thin Glass

机译:基于超薄玻璃的电子系统沉积技术

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摘要

This work focuses on deposition technologies to be applied for the development and manufacturing of sensors based on ultra-thin glass substrates. The deposition technologies of interest are silkscreen printing, ink-jet printing and physical vapour phase deposition (PVD). In this project, the main target is to develop technologies for flexible sensors to be used for high temperature fuel cells applications. This application case demands for sensors which sustain harsh environmental conditions and which are of very low thickness. Use case conditions involve temperatures above 400 °C and a chemically reactive ambient. The stack design of a fuel cell demands for sensor with a thickness less than 250 μm. Such thin sensors may offer mechanically flexibility which would be of interest for other applications. Furthermore, the aim of the project is to develop manufacturing technologies which can be transferred to roll-to-roll (R2R) processes in future. Finally, not only the deposition of conductor materials but also resistor, insulator and eventually specifically sensitive materials and coatings are subsequent tasks. A use of sensors based on ultra-thin glasses technologies for the described use scenario is not known neither in the state of technology nor in literature. In case of a successful development, such sensor systems would enable an increased fuel cell efficiency due to the ability of in-situ measuring of process parameters. Additionally, ultra-thin flexible sensors which sustain harsh environmental conditions and cheap to produce will be useful in many other applications.
机译:这项工作的重点是沉积技术,该技术将用于基于超薄玻璃基板的传感器的开发和制造。感兴趣的沉积技术是丝网印刷,喷墨印刷和物理气相沉积(PVD)。在这个项目中,主要目标是开发用于高温燃料电池应用的柔性传感器技术。该应用案例要求传感器能够承受恶劣的环境条件并且厚度非常薄。用例条件涉及温度高于400°C和具有化学反应性的环境。燃料电池的堆叠设计要求厚度小于250μm的传感器。这样的薄传感器可以提供机械灵活性,这将是其他应用感兴趣的。此外,该项目的目的是开发可在将来应用于卷对卷(R2R)工艺的制造技术。最后,接下来的任务不仅是导体材料的沉积,而且还包括电阻器,绝缘体以及最终特别敏感的材料和涂层的沉积。基于超薄眼镜技术的传感器在所描述的使用场景中的使用在技术状态或文献中均未知。在成功开发的情况下,由于能够现场测量过程参数,因此这种传感器系统将能够提高燃料电池的效率。此外,可承受恶劣环境条件且生产成本低廉的超薄柔性传感器将在许多其他应用中有用。

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