Smart Slit Assembly Employing Continuously Tunable MEMS Shutter

摘要

We present the concept and detailed design of a Smart Slit Assembly for next generation spectrometers, and we experimentally demonstrate operation of an individual 221 μm × 111 μm smart slit channel employing a MEMS actuated shutter to continuously modulate the intensity of the optical input signal. The MEMS actuated shutter is fabricated in a 211 μm thick device layer of a Silicon-On-lnsulator wafer by Deep Reactive Ion Etching. Electrostatic comb drive actuators allow an absolute displacement of 52 μm at 74 V, resulting in a continuously tunable shutter efficiency of up to 99.97% at an operating wavelength of 532 nm.