Progress in tunable longwave infrared notch filters

摘要

We describe recent progress in the development of spectrally tunable micro-engineered notch filters operating in the longwave infrared (LWIR) region from 8 to 12 μm based on using the guided-mode resonance (GMR) effect. The device structure consists of a subwavelength dielectric grating on top of a homogeneous waveguide using high-index dielectric transparent materials, i.e., germanium (Ge) with a refractive index of 4.0 and zinc selenide (ZnSe) with a refractive index of 2.4. We design the filters to reflect the incident broadband light at one (or more) narrow spectral band while fully transmitting the rest of the light. Filters based on one-dimensional (1-D) gratings are polarization-dependent and those based on two-dimensional (2-D) gratings are less polarization-dependent. We designed and characterized both 1-D and 2-D filters. Anti-reflection coatings (ARCs) were applied on the backside of some of the filter substrates to improve transmission over the entire spectral region. We carried out transmission measurements of these filters using two separate experimental setups-an automated tunable room-temperature quantum cascade laser (QCL) system as well as a modified Fourier Transform Infrared (FTIR) spectrometer with normal incidence of light on the sample. We will present filter designs, theoretical simulation, characterization experiments and results.