Research on a Linear Ultrasonic Motor with Double Cantilever Vibrators

摘要

This paper presents an idea on the development of a new type of a linear ultrasonic motor with double cantilever vibrators. The vibrator is first designed theoretically and then simulated using finite element analysis software (ANSYS) to obtain the modal frequency and mode shape. The resonance frequencies of the vibrators are determined to be 21.33 kHz, and this is also the frequency in which the two vibrators are driven to determine the output parameter such as driving force and velocity. The frequency difference between the first and the second vibrator is found to be almost zero. Based on the analysis of the theory, a proof- of-principle prototype of stator is fabricated and the mode testing results verifies that the proposed principle of operation is successfully implemented.