Study of the Effect of Al and In Doping on the Structural, Optical, and Electrical Properties of Sprayed SnO2 Films

摘要

In this work we study the effect of Al and In doping on the structural, morphological, electrical and optical properties of SnO2 thin films. These films are deposited on glass substrates by spray pyrolysis technique, and doped with different Al and In concentrations (0, 2 and 4at^%). The deposited films were studied by X-ray diffraction XRD, scanning electron microscopy SEM, UV-Vis spectrophotometry, and four probe technique for electrical resistivity measurements. The XRD shows that all films were polycrystalline and exhibit tetragonal rutile structure with (110) plan as preferred orientation. The SEM image shows a dense surface with different shapes and sizes grains depending of the doping element. The transmittance of the films is in the average of 70 - 85%. The incorporation of Al and In dopants in the films improve its electrical and optical properties.