Effect of plasma treatment for removing aliphatic contaminants by infrared spectroscopy on MgO(100) and quartz substrates

摘要

To establish the non-contact and low cost evaluation of the surface contaminants, an infrared p-polarized multiple-angle incidence resolution spectrometry (p-MAIRS) technique was performed on four kinds of MgO and quartz substrates with different cleanness. The results show that plasma treatment is effective to remove aliphatic contaminants.