High terahertz transmittance and blocking IR background noise package window design for terahertz focal plane array detectors

摘要

Terahertz (THz) detector array with microbolometer structure indicates obvious benefits, such as room temperature operation, easy integrating with ROIC, real time imaging, and so on. In order to improve the THz transmittance of detector window, anti-reflection thin film was coated on HRFZ-Si window and THz-TDS test results indicated over 90% transmissivity in the designed THz waveband. Moreover, very low long wave infrared radiation in environment could transport through metal square array covered substrate, which would reduce the background infrared noise for the THz detector.