Analytical Compact Model for PMUTs Interfaces

摘要

Piezoelectric Micromachined ultrasound transducers (PMUT) have been studied extensively in the last few years, with a focus on the transducer fabrication or application driven front-end interface. This paper presents an analytical approach that addresses PMUTs along with their front-end interfaces. It provides an analytical compact model which aids with defining the different signal levels within each of the PMUT's three physical domains: mechanical, electrical and acoustic. The model input parameters are the transducer physical dimensions and its layers stack configuration. The model extends to include the transducer's analog front-end (AFE) interface. Transfer functions of the PMUT along with its frontend are derived showing good agreement when compared with measurements from literature.