High temperature coefficient of resonant frequency induced by thermal stress using a double-supported mechanical resonator with a simple structure for highly thermal sensing

摘要

A resonant frequency changes of some shape double-supported mechanical resonators are investigated for highly sensitive thermal measurement using resonant sensors. Thermal stress of resonators, which depends on the shape, has large effects to the temperature coefficient of resonant frequency (TCRF). The resonant frequency changes of Y, I, T, shape double-supported resonators are experimentally evaluated changing the temperature, and compared with the theoretical thermal stress change. The Y shape resonator is most effective shape to increase TCRF due to the large thermal stress, and the value is −650 ppm/K. The experimental resonant frequency change and theoretical thermal stress have a good agreement, which contribute to estimate the TCRF of the double-supported resonators.